Tokyo Electron Ltd. Trias Ti/TiN Chamber

Tokyo Electron Ltd. Trias Ti/TiN Chamber Parts/Peripherals 

Currently Configured for 300mm wafer size

EQUIPMENT DETAILS:

Chamber Only

Chamber Qty 4

TiN (PM1/PM2/PM3/PM4)

Basic System (TEL Trias) Tool ID: DMT104 (STTRL1T200) - PM1/PM3

Chamber Position: F16 Warehouse

Chamber Process type: SFD TiN

Gas Supply Config

Manual valve N*: Yes

Regulator (N2-1/N2-2): Yes

Regulator (N2-PF): Yes

Regulator (Ar): Yes

Pressure sensor (All gas line): No

Filter (N2-PF): No

Manual valve (Dry air line): Yes

Filter (Dry air line): No

Regulator (Dry air line): No

Pressure sensor (Dry air line): No

Pressure gauge (Dry air line): No

Chamber TEL TRIAS TIN

1333Pa Manometor: Yes

133kPa Capacitance manometer: Yes

O-rings: Yes

O-rings: Yes

O-rings, Cubic Trap I/O: Yes

Gate Valve (Slit Valve): Yes

APC Valve: Yes

Cubic Trap: Yes

Vacuum valve(VEP1): Yes

Vacuum valve(VEP2,3): Yes

Pressure Gauge, exhaust system: Yes

Flow Meter for cooling water: No

Water Leak Sensor: Yes

Gas Box Configuration

Gas Stick 1: Yes

Gas Stick 2: Yes

Gas Stick 3: Yes

Gas Stick 4: Yes

Gas Stick 5: Yes

Gas Stick 6: Yes

Gas Stick 7: Yes

Gas Stick 8: Yes

DLI: Yes

Heater Bottom Purge: Yes

Air Operation Valves: Yes

Gas Filters: Yes

Regulators: Yes

Gas lockout system: Yes

Kit Parts:

STAGE HEATER ASSY,ELPR STG HTR Ver2.4: Yes ( Ver2.5)

TiN Shower Base: Yes

"Inludes PLATE SHOWER SPACER 300TIN S1, PLATE SHOWER HEAD 300TIN,

BLOCK GAS DIFFUSION, SCREW LONG HEAD M6X15, SCREW M6X28, SPRING

WASHER SPAK M6, TUBE GAS INLET 300TIN, WASHER FLAT..M6 MA22 RGLR: TiN

Shower Plate

TiN Shower Block"