2006 Applied Materials Endura II Liner/Barrier

2006 Applied Materials Endura II Liner/Barrier

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Description

Applied Materials Endura II Liner/Barrier PVD (Physical Vapor Deposition)

Currently Configured for 300mm wafer size

MFG Date: January, 2006

EQUIPMENT DETAILS:

Tool is operating in clean room.

‘Equipment is located in Micron’s cleanroom and is schedule for deinstallation by [VENDOR

NAME]. Buyer is responsible for $X,XXX.XX in de-installation costs payable to Micron. Buyer is

also responsible for packaging, crating, loading and shipping’

A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.

[Chamber 2]

For Ti PVD chamber

DCPS;OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,OBIS,HELIX

HT ESC type stage

Ar;150/20sccm

[Chamber 3]

For TiN PVD chamber

DCPS;OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,OBIS,HELIX

A101 type stage

Ar/N2;150/200sccm

[Chamber 4]

For TiN PVD chamber

Macquarie Equipment Trading on behalf of

Micron Memory Japan, G.K.

This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be

provided to any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is,

to our knowledge and information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information

contained herein. Any offer by you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.

Interested parties may request additional information from one of our global sales offices, or via email at EquipmentTrading@Macquarie.com.

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© 2020 Macquarie Group

DCPS;OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,OBIS,HELIX

A101 type stage

Ar/N2;150/200sccm

[Chamber C]

For Pre-CLN chamber,PCXT

RFPS;CDX-2000,13.56/2MHz,COMDEL,for BIAS/SLA

PUMP/TMP MAG1300,LEYBOLD.

Ar;200/20sccm

[Chamber D]

For Pre-CLN chamber,PCXT

RFPS;CDX-2000,13.56/2MHz,COMDEL,for BIAS/SLA

PUMP/TMP MAG1300,LEYBOLD.

Ar;200/20sccm

[Chamber E]

For Degas,Plate heater

PUMP/CRYO,HELIX ON-BOARD IS

Ar,press. Controlled

[Chamber F]

For Degas,Plate heater

PUMP/CRYO,HELIX ON-BOARD IS

Ar,press. Controlled

Missing or damaged parts: Not reported. Please inspect to confirm

Specifications

ManufacturerApplied Materials
ModelEndura II Liner/Barrier
Year2006
ConditionUsed
Stock Numberem1192
WAFER SIZE300mm