2001 Tokyo Electron Ltd. NS 300

Tokyo Electron Ltd. NS 300 Wafer Scrubber

MFG Date: 2001

EQUIPMENT DETAILS:

• Currently Configured for 300mm wafer sizes

• (3) 300mm FOUP Load Ports

• (1) Cassette Station Arm (CS Arm)

• (1) Process Station Arm (PS Arm)

• (2) Frontside Scrub Process Stations (F.Scr)

• (2) Backside Scrub Process Stations (B.Scr)

• (2) Auto Reversing Stations (A.RVS)

• Supporting Equipment:

o AC Power Box