JEOL JWS-7555

JEOL JWS-7555

SEM - Defect Review (DR)

Currently Configured for 200mm wafer size

MFG Date: TBC

EQUIPMENT DETAILS:

Inspect to confirm configuration and condition.

Missing parts list as below:

a. Dry pump

b. turbo pump

c. emitter / gasket

d. hard disk

e. ceramic arm

f. exchange chamber o-ring

No EDS.

Stage and check need to open the chamber, but now can not to open chamber.