KOKUSAI DJ-815V-8L LPCVD Reactor
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Description
Kokusai DJ-815V-8L LPCVD Reactor
- Load-locked, fully automated (CX 2003A controller)
- High throughput
- Cassette-to-cassette vertical reactor
- Capable of handling 8" (200 mm) wafers
- Configured for deposition of both doped Polysi and Silicon nitride
**Item is crated, but crates can be opened if needed for inspection**
Specifications
| Manufacturer | KOKUSAI |
| Model | DJ-815V-8L LPCVD Reactor |
| Condition | Used |
| Stock Number | em1251 |