KOKUSAI DJ-815V-8L LPCVD Reactor

Kokusai DJ-815V-8L LPCVD Reactor

• Load-locked, fully automated (CX 2003A controller)

• High throughput

• Cassette-to-cassette vertical reactor 

• Capable of handling 8" (200 mm) wafers

• Configured for deposition of both doped Polysi and Silicon nitride

         **Item is crated, but crates can be opened if needed for inspection**