VCR Group IBS TM200S Ion Beam Sputterer

VCR Group IBS TM200S Ion Beam Sputterer

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Description

VCR Group IBS TM200S Ion Beam Sputterer

VCR Group IBS TM200S ion beam sputtering system is useful for SEM

and TEM sample preparation. The IBS/TM200 Ion beam sputter-coating

device is equipped with a 200 l/s turbo-molecular pump, an ion-beam

gun, a quartz crystal thickness monitor, a four-position target carrier, and

a liquid nitrogen cold trap.


System specifications:


Electrical:

 Interlocked to prevent high voltage shock

110 V AC, 50/ 60 Hz, 15 A

220 V AC, 50/ 60 Hz, 10 A (Optional)


Mechanical:

Weight: < 500 lbs

Size: Approximate overall dimensions

50” H x 24” W x 32” D (chamber lid open)

40” H x 24” W x 32” D (chamber lid closed)


Utilities:

Argon Gas Flow: 5-10 psi, 1.5 sccm, 99.999 % pure

Nitrogen Gas Flow: Turbomolecular Pump bleed

Water Flow: 30 GPH, clean water

Specifications

ManufacturerVCR Group
ModelIBS TM200S Ion Beam Sputterer
ConditionUsed
Stock Numberem1254