FAS MicroE-200 Extrusion Coating System

FAS MicroE-200 Extrusion Coating System



FAS MicroE-200 Extrusion Coating System is

capable of directly, precisely, and uniformly

depositing very thick coatings (100 microns) in a

sigle step on 150mm or 200mm wafers. Useful

for MEMS and for flat panel display applicatiions.