AMAT AME 8100 Plasma Etcher

AMAT AME 8100 Plasma Etcher

AMAT AME 8100 Plasma Etcher used for reactive ion

etching of oxides, nitrides, and resist descum. System is

configured to process, 4", 5", or 6" wafers. System is

complete and in excellent operating condition. System

comes with multitude of spare parts.