2008 Hitachi S-9380II

No of FOUR port: 3

W/S (PC): Hitachi HF-W2000

Software Version: 26.23

Turbo Pump: Leybold/TMP340ML/3

Chiller: Hitachi / W-5010T

Power Supply Unit: PS Unit (569-6546)

Status: Machine has just offline and disassembled