2011 DNS WS 820 L

- Automated Alpha Tool (Double Sided Porous Silicon: 25 wafer batch)

- Wafer Flow Left to right

- Cassette included

Components to include:

- Main body

- Loader / Unloader

- Two robots for bath to bath transfer systems – one robot for wet wafers and one for dry; Robot arms to be Teflon coated quartz - 2 units

- Double Sided Porous Silicon bath – 1 unit

- Electrical Breaker Box for U.S. safety regulation

- CD ROM Manuals

- Material is FM-PVC to meet FM4910 criteria

System description:

- Position 1 : Loader (CTC type)

- Position 2 : CHCL (Robot Chuck Clean)

- Position 3 : PS (Single-Double Sided Porous Silicon bath)

- Position 4 : QDR (Quick Dump Rinse)

- Position 5 : SD (Spin Dryer)

- Position 6 : Unloader (CTC type)

Other components:

- Notch Aligner

- Wafer Counter

- IPA replenishment function for PS bath(w/ anti explosion)

- HF49% replenishment function for PS bath

- Fire extinguisher system for PS bath

2011 Vintage