Hitachi CD-60 Super Catalytic Decomposition System

Hitachi CD-60 Super Catalytic Decomposition System

The Hitachi SCDS is designed for processing PFC gases used in

semiconductor fabrication. The system features a 60l/min gas

throughput and decomposition rates of over 99.4% for CF4, C2F6,

CHF3, C3F8, C4F8, NF3, CO and SF6.

The Hitachi SCDS offers superior cost of ownership versus

Capture/Re-cycle; Combustion; or Chemical Conversion

technologies since it uses little electricity, only 1 gpm of water,

and has a catalyst lifetime of more than 4,600 hours. The

SCDS-60 has a footprint of only 37" Wx19.5 " Dx77"H. and is fully

S2-93 and CE compliant