KLA/ MicroSense UMA-C200-STR Thin Film Stress Measurement System

200mm

As-is

KLA / MicroSense UMA-C200-STR Thin Film Stress Measurement System consisting of:

- Vintage: Approximately 2019

- Provides:

- Wafer Thickness

- Average wafer bow and warp, average wafer radius of curvature

- Average wafer film stress

- 2D Local Stress Map with Min and Max values

- 3D Local Stress Map with Min and Max values

- Local Line Stress Profiles with specified orientation, including Min and Max values.

- Exportable data and maps 

- Used Minimally for R&D & Light Production 

Condition:

Used

Condition:

Operational, installed in fab. 

Being Sold in As-Is / Where-Is Condition.