KLA- Tencor Alpha Step IQ

KLA-TENCOR ALPHA-STEP IQ PROFILER consisting of:

- Model: Alpha-Step IQ

- Up to 6”/150mm Wafer Capable

- Scan length: 10mm

- Scan Speed: 2um/s to 200um/s

- Step Height Repeatability: 7.5Å or 0.1% of measured vertical range

- Computer Controlled Scanning and Data Collection

- Comprehensive Data Analysis Software

- Intuitive User Interface

- Application-Specific Recipes easily programmed

- Zoom Optics with Magnification up to 210x

- Multi-Scan average mode scans up to 10 times and then averages the scan before print out

- Powerful Data Analysis w/ up to 30 standard surface parameters selections

- Accurate Surface Characteristic Measurement

- 2D Step Height Metrology Profiling

- System Fully Refurbished by factory-trained technicians and Delivered with New Stylus (part of refurbishment process)

- Operations Manual and Documentation