Novellus/ LAM Sabre XT Plating Tool

As-is

- 3 open cassette load stations

- 5 anneal chambers

- 3 Electrofill Cells (Plating Cells)

- 3 Post Electrofill Cells (see attachment – these could be post electrofill modules (PEMs) with EBR hardware)

Note, the seller thinks the post electrofill cells are the EBR 

HD removed