AMAT AKT 1600

• Tool Model : AMAT 1600 PECVD

• Vintage 2005

• Process: PECVD iN,SiO2, i-a-Si,

SiON and N+ a-Si

• Software Version: AKT7.3

• System Power Rating: 208 VAC 3-

Phase

• Flat panel size: 320 x 352 mm

• (5) Process chambers:

• Film Capability SiN

• SiO2

• i-a-Si

• SiON

• N+ a-Si (Remote Plasma

Clean)

Includes:

• Chillers