2004 Mattson Technology ASPEN 2

Wafer Size 200 mm

Fab Section Etch

Asset Description MATTSON ASPEN 2 PHOTORESIST STRIPPING MACHINE

Software Version 5.56E3B

CIM GEM

Process PHOTORESIST STRIPPING PROCESS

Main System MAIN TOOL 1

GEN RACK 1

Missing/ Faulty Parts/ Accessories List:

DRY PUMPS (NOT FOR SALE)

LPT (NOT FOR SALE)