2000 Varian E500 EHPI

Type E500 EHPI

Wafersize 150mm

Manufacturing Year Aug 2000

CE Mark Yes

Connection top/bottom top

Source

Source #1 IHC

Vaporizer Option No

IHC Arc PS Yes E19297950

IHC Filament PS. Yes E19014142 RevF

IHC Bias PS. Yes E19294270 RevC

Gasbox

 String #1 SDS

 String #2 SDS

 String #3 SDS

 String #4 HP

Beamline

Two Step Reducer Yes E11078910 RevC

Gauss Meter Yes E11053620 RevA

Terminal Pneumatics Yes E11064970 RevC

Auto Decel Yes

Total Beamenergy Probe Yes

Mirror PS Yes E11004140 RevC

Scan Amplifier Yes E19000790 RevA

Setup Cup Amplifier Yes E11000351 RevC

Endstation

Chucksystem ESC

Dose Integrator Yes E11001033 RevA

DI Temp Monitor Controller Yes E11001200 RevF

Uniformity Controller Yes E11001010 RevK

Platen Tilt Servo Controller Yes E11048890 RevB

Scanning Faraday Controller Yes E11048881 RevB

E-Flood Controller NO

Right Elevator Controller Yes E11000821 RevA

Left Elevator Controller Yes E11000821 RevA

Orienter Controller Yes E11001410 RevB

Uniformormity Controller Yes E11001010 RevK

Gauge Controller Yes E11000071 RevB

Right Arm Controller Yes E11001000 RevH

Left Arm Controller Yes E11001000 RevH

Scanning Faraday/Rotating Platen Controller Yes E11048881 RevB

Endstation Pneumatic Interface Yes E11064980 RevC

Right Handler Pneumatic Interface Yes E11064990 RevC

Left Handler Pneumatic Interface Yes E11064991 RevC

Linear Motor Servo Controller Yes E11001062 RevB

Control System

Computer Win7,  E19008703

Remote Monitor No

Software V15.10.12 SW-Licence must be purchased from AMAT

EHPI Computer No

Light Tower Yes

High Vac Pumps

Source Turbo Pfeiffer

Analyzer Turbo Pfeiffer

Scanner Turbo Pfeiffer

Endstation Cryo Cryo Torr10 8018236

LoadLock right Cryo Torr4FR 8108996G001

LoadLock left Cryo Torr4FL 8108997G001

Dry Roughing Pumps

Source/Terminal Edwards Setup not included

Differential Seal Busch Scroll Fossa 15

Endstaton / Load Lock Edwards Setup not included

Remote Facility Rack

Cryo Comp 9700A 8135924G001

Motor Alternator Yes

DI Waterpump Yes