2003 Mattson Technology Aspen III

2003 MATTSON Aspen III Dual Chamber ICP Ashers, configured for 8"

8" / 12" platform

Single Wafer

Process: Plasma Stripper

Power Requirements: V 208, Phase 3, 5-wire, Freq 50/60Hz

Ultraclean Mini-environment (Blower Unit)

SECS II / GEM

Status Lamp (3-Color)

Universal Remote AC Box

208 V, Phase 3, 5-wire, Freq 50 / 60Hz

Wafer Handling:

2 Asyst Versaport Integrated SMIF

4-Paddle

Process Chambers:

Position B & C: Highland ICP

AE RFX600A

Chuck Type: Pedestal

High-Temp Heater Block

Turbo: Osaka TG1813BW-90

Chamber Gas Config (both chambers):

Gas Line: Gas: Size(sccm): MFC Type:

#1:Ch-B and C N2 200 Aera FC-D985C

#2:Ch-B and C CF4 100 Aera FC-D985C

#3:Ch-B and C O2 1000 Aera FC-D985C

#4:Ch-B and C O2 100 Aera FC-D985C

#5:Ch-B and C H2 100 Aera FC-D985C

#6:Ch-B and C Ar 500 Aera FC-D985C

#7:Ch-B and C  CH2F2 100 Aera FC-D985C

#8:Ch-B and C NH3 200 Aera FC-D985C

Options:

2 Way Slit Door

Blade Assembly w/Fluorosilicon O-Rings

Universal Remote AC Box

CE Marked

Has been recently deinstalled, crated and moved to a warehouse.  It comes with a second parts tool that is included in the price.