2012 HITACHI SU-8040

Secondary electron image resolution:

1.0nm (15kV, WD=4mm)

1.3nm (1kV, WD=1.5mm, Deceleration mode)

Secondary electron detectors: Top, upper and lower

Magnification:

LM mode: 20 ~ 2,000X

HM mode: 100 ~ 800,000X

Specimen Stage:

Stage Motorization: 5 Axis Hitachi Regulus Stage

Type I: X: 0 ~ 110mm; Y: 0 ~ 80mm, Z: 1.5 ~ 40mm; T: -5 ~ +70 deg, R: 360 deg.

Maximum sample size: 150mm

Stage Repeatability less than +/- 0.5 microns

Configuration:

Operating System: Windows 7

Options: EDX, BSE, STEM