2004 SEMITOOL Raider 210 ECD

Model: Raider 210 ECD

Type: Electroplating

Model Number: R310PD2(1SA2CFD1CAP)08(CuNi)03

SYSTEM GENERAL CONFIGURATION

3 X Cassette WIP

1 X Capsule (Backside Clean & Backside Bevel Etch), 2 X ECD (CFD3), 1 X SRD

1 X Linear Dual Arm Robot with Single Vacuum End effector

1 X ARU (Advanced Replenishment Unit)

2 X CDU (Chemical Delivery Unit)

2 x Heat Exchanger

1 x DI Boost Pump Unit

Fire Suppression System with three CO2 bottles

MAIN POWER

208 VAC, 3Phase, 4 Wires, 50/60 Hz

COMPUTER & CONTROL

1 x WIP Computer, 1 X Module Computer, 1 X Robot Computer

1 X FUI (Front User Interface), 1X RUI (Rear User Interface)

502 Controller with WINDOWS EMBEDDED OS

Tool Software Version is unknown

Description

MISSING PARTS

Contacts Rings and lip seals (Consumable)

Anodes (Consumable)