2004 HITACHI s-9380 CD-SEM

Wafer size : 12 inch

Resolution : ≦2nm

Static measurement repeatability(3σ) : 0.6nm

Dynamic measurement repeatability(3σ) : 1.7nm

Throughput : 33(20point)

Stage stop position accuracy : ±1um

Accelerating voltage : 300 ~ 1600V

Measurement range : 0.050 ~ 2.0um

Image process : VIPS200

Missing/Defect parts

・IP power supply 1ea

・Stage laser excel board 1ea

・Turbo pump 2ea