1997 RUDOLPH FE-VII-SD

The dual wavelength FE VII-SD is a production metrology tool built around a FOCUS ellipsometer.

Rudolph Technologiesl wavelength FE VII-SD is a production metrology tool built around a FOCUS ellipsometer. 

This tool measures films using multiple wavelengths and multiple angles of incidence. 

It gives measurements for even the thickest films, while keeping the inherent accuracy of a true ellipsometer when measuring the thinnest. 

The metrology system also handles multi-layer film stacks and complex multi-parameter composition measurements.

The product produces unambiguous results because one fully capable measurement system is used for all applications from thick polyimide to the thinnest gate oxide.