KLA-TENCOR SpectraMap Auto SM300

KLA / TENCOR / SM 300 is a wafer testing and metrology equipment that performs a range of functions such as surface analysis, defect inspection, metrology, and defect characterization.

The system consists of a scanner, a deterministic wafer handling unit, and a wide variety of options for custom requirements.

KLA SM 300 uses advanced technologies for its broad range of tasks.

It is equipped with an advanced-sensing digital microscope with a 5 megapixel resolution. This allows the machine to perform various operations such as imaging of film structures, surface topology, and defect morphology.

The microscope is also used for measuring film thickness and for evaluating microstructure.

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