1995 Gasonics L3510 - 150mm Asher

Gasonics L3510 - Asher

Vintage: 1995

Wafersize: 150mm

200mm convertible: Yes

The Gasonics L3500 plasma system is designed for ashing and cleaning semiconductor wafers. Gasonics L3500 does this by creating monatomic oxygen, the active specie, which chemically reacts with the photoresist on the surface of the wafer.

Model: Gasonics L3500 Asher semiconductor process equipment

Category: Plasma Asher

Original Equipment Manufacturer: Gasonics

Robot upgrade: HINE Hatm 5.0 atmospheric robot arm

Wafer Size: 6 inch configuration.

Process Gasses: O2 and N2 

Dimensions & weight estimates:

Mainframe dim (cm): 85 x 110 x 155

Mainframe weight (kg): 200