1994 Gasonics L3300 - 150mm Asher

Gasonics L3300 - Asher

Vintage: 1994

Wafersize: 150mm

200mm convertible: Yes

The Gasonics L3300 plasma system is designed for ashing and cleaning semiconductor wafers. Gasonics L3300 does this by creating monatomic oxygen, the active specie, which chemically reacts with the photoresist on the surface of the wafer.

Model: Gasonics L3300 Asher semiconductor process equipment

Category: Plasma Asher

Original Equipment Manufacturer: Gasonics Original robot

Wafer Size: 6 inch configuration.

Process Gasses: O2 and N2

Dimensions & weight estimates:

Mainframe dim (cm): 85 x 110 x 155

Mainframe weight (kg): 200