HITACHI SU-70

Hitachi SU-70, Ultra-high resolution analytical Scanning Electron Microscope SEM

Model SU-70 is a new-concept SEM, incorporating Hitachi’s field proven semi-in-lens technology for ultra-high resolution with a Schottky electron gun. It features not only ultra-high resolution (1.0nm/15kV, 1.6nm/Kv (*)) but also reduced charge-up imaging, compositional-contrast imaging, and ultra-low voltage imaging (*) derived from Hitachi’s highly reputed Super ExB filter technology. 

The Schottky electron gun enables a wide variety of analytical capabilities due to its high probe current (100nA). 

The newly designed sample chamber to cope with analytical work allows to mount various detectors (EDX, WDX, EBSP, STEM, BSE, CL) or cryogenic sample stage. 

Especially in semi-in-lens mode, EBSP analysis has encountered difficulties due to magnetic flux. 

Major features of SU-70 Ultra-High Resolution Analytical SEM 

. Ultra-high resolution: 1.0nm/15kV, 1.6nm/1 kV (*) 

. SE･BSE signal control by Super ExB 

. Ultra-low accelerating voltage for shallow surface observation 

. 100nA probe current 

. EBSP analysis by Field-Free Mode 

. Sample chamber designed for a wide range of analytical accessories