2005 LAM Rainbow TCP 9600SE II standalone with DSQ - 150mm Plasma Etch

LAM Rainbow TCP 9600SE II standalone with DSQ - Plasma Etch

Vintage: 2005+/-5j

Wafersize: 150mm

200mm convertible: Yes

Former BelGaN process: metalpets

TECHNICAL SPEC FOR Etch tool

System Model: LAM Rainbow TCP 9600

Process: Metal etch

Wafer size: 6”

Wafer type: FLAT

Valve type: VAT pendulum valve 65 series

SMIF: No

ESC (Ceramic?): Coated aluminum ESC – LAM # 718-094756-061

Bulkhead: Wall facia are missing

Monochromator Endpoint: Dual endpoint detector - LAM # 853-001983-110

Software: E2.0.1-044

RF: 3x on board Trumpf generators (Top, bias, DSQ)

Cart: No

Iso module: DSQ module

AC box: No

MFC: See pictures of gas box

Gas and process configuration for

- Chamber (1)

- DSQ Strip Chamber

Robot type: Harmonic drive

Loader type: Hine indexers 38A 

Loadlock:

Turbo pumps: Alcatel ATH1300MT

Controllers:

▪ Adixen Magpower (Turbo pump)

▪ 12 CH Anafaze temp controller

▪ AC2 controller (throttle valve)

▪ VAT PM7 controller (VAT pendulum valve)

▪ Manual WVDS controller

Gas box: See pictures

AC Rack: See pictures

SW Version: E2.0.1-044

Vintage:

Missing/defective parts: None – tool is operational

Photos to Collect

• All 4 sides

• Robot

• Loader

• Gas lines

• Gas box

• Close up from each chamber

• Turbos and Pumps on each process modules

• Controllers

• Electrical cabinets

• AC Rack

• Gas in/outlets

• Electrical in/outlets

• Chiller

• Serial plates of chamber

• Serial plate of Mainframe

• Serial plate of each pump

• Spare parts, manuals (if any)

Dimensions & weight estimates:

Mainframe dim (cm): 125 x 220 x 190

Mainframe weight (kg): 1500

Bypack1 dim (cm): 50 x 50 x 25

Bypack1 weight (kg): 50