Nanotronics Automation (Franklin Mechanical) SMP-28
Nanotronics Automation (Franklin Mechanical) SMP-28
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Description
Nanotronics Automation (Franklin Mechanical) SMP-28 wafer handler for 50mm to 200mm wafers
Front load cassette design
cassette mapper detects empty slots and crossed slotted wafers
Pre align wafers with flats or notch
Interfaces with all Franklin MCI stages
Includes PC, monitor, software
Specifications
Manufacturer | Nanotronics Automation (Franklin Mechanical) |
Model | SMP-28 |
Condition | Used |
Stock Number | EM915 |