Nanotronics Automation (Franklin Mechanical) SMP-28

Nanotronics Automation (Franklin Mechanical) SMP-28

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Description

Nanotronics Automation (Franklin Mechanical) SMP-28 wafer handler for 50mm to 200mm wafers

Front load cassette design

cassette mapper detects empty slots and crossed slotted wafers

Pre align wafers with flats or notch

Interfaces with all Franklin MCI stages

Includes PC, monitor, software

Specifications

ManufacturerNanotronics Automation (Franklin Mechanical)
ModelSMP-28
ConditionUsed
Stock NumberEM915