Zeiss LM100 Microscope Large Panel Inspection Tool

Zeiss large panel inspection and CD (critical dimension measurement) tool with laser autofocus

Merzhauser motorized xy stage with 550mm x 550mm travel (21.6"x21.6")

Stage dimensions 575mm x 700mm. Opening in stage 305mm x 445mm

Distance between granite supports 49 inches.

Axiotron 2 microscope configured for brightfield, darkfield, and DIC with motorized polarizer

Laser autofocus

Motorized nosepiece rotation with Epifluor HD DIC objectives 5/10/20/50/100x

6 place motorized nosepiece with Nomarski prisms for DIC

12v/100w lamphouse for reflected light

transmitted light source with Zeiss KL1500 fiber optic power supply

WIS8000 software