CEE 200FX Coater

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Description

CEE 200FX Coater for substrates up to 14x14 square with cabinet and stainless fume hood

Configured for 300mm wafers

PLC control 

0-23,000RPM with 300mm substrate

Touch screen interface with USB/Ethernet port

(2) Integrated Designs IDS400 photoresist pumps

Stand alone cabinet configuration including fume hood

Spare parts available including motor drive and display


Specifications

ManufacturerCEE
Model200FX Coater
ConditionUsed
Stock NumberEM935