Tepla 600-AL (autoload)
Tepla 600-AL (autoload)
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Description
Tepla 600-AL (autoload) plasma asher
230v, 13 amps, 50/60hz
1731 hours
- Semi-Automatic RF Plasma System
- Can process up to 200mm wafers
- Used for photoresist stripping and surface cleaning, as well as etching silicon and its compounds
- Chamber Size: 245mm diameter, 380mm depth
- Chamber Material: ceramic
- ENI RF Generator: 0-600 Watt, 13.56 MHz
- Gases: 4 channels controlled by 4 MFCs
- Leybold D65B Vacuum Pump
- Dimensions: 740mm x 624mm x 701mm + connections
- Electrical: 230V, 50/60Hz, 15A, 2kW
Specifications
Manufacturer | Tepla |
Model | 600-AL (autoload) |
Condition | Used |
Stock Number | EM939 |