Glen Technologies (Yield Engineering) R3A 500W low frequency Plasma Asher

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Description

Glen Technologies (Yield Engineering) R3A 500W low frequency Plasma Asher

PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort. 


Active Plasma for routine cleaning of sample surfaces


RIE Plasma for aggressive cleaning of non ESD sensitive samples


Downstream, Electron-Free Plasma for cleaning sensitive electronic components 


The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence 


Advanced Energy PE-1000 AC Plasma Power Source; 500w@ 40khz


Electrodes: (2) 14 x 14-inch electrode sets; capable of up to 8 sample trays


3 Plasma Modes: 


   ACTIVE PLASMA for routine cleaning of sample surfaces


   RIE PLASMA for aggressive cleaning of non-ESD sensitive samples


   DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components


Gas Inputs: dual gas inputs with needle valves, PLC-controlled


Computer Interface: RS 232 interface


Power Requirements: 110Volt


Full Load Current Rating: 13 Amp

Specifications

ManufacturerGlen Technologies (Yield Engineering)
ModelR3A 500W low frequency Plasma Asher
ConditionUsed
Stock Numberem949