Lam Research 490 Polyimide plasma etcher

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Description

Lam Research 490 Polyimide plasma etcher

Fully Rebuilt by Aspect systems.  6 gas inputs. ENI OEM6-XL power supply.

Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

Specifications

ManufacturerLam Research
Model490 Polyimide plasma etcher
ConditionUsed
Stock NumberEM978