Lam Research 490 Polyimide plasma etcher
Lam Research 490 Polyimide plasma etcher
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Description
Lam Research 490 Polyimide plasma etcher
Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply.
Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller
Specifications
| Manufacturer | Lam Research |
| Model | 490 Polyimide plasma etcher |
| Condition | Used |
| Stock Number | EM978 |