Solitec 820ACB

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Description

Solitec 820ACB Coat Bake Track System

Solitec 820ACB coat/bake track, configured for 150mm wafers using Fluoroware A182-60MB cassettes, hotplate bake to 300C, spin coat with 0-40KRPM acceleration and max spin 200-8000RPM, automatic dispense including 2 photoresist pumps

Specifications

ManufacturerSolitec
Model820ACB
ConditionUsed
Stock NumberEM982