Solitec 820ACB
Solitec 820ACB
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Description
Solitec 820ACB Coat Bake Track System
Solitec 820ACB coat/bake track, configured for 150mm wafers using Fluoroware A182-60MB cassettes, hotplate bake to 300C, spin coat with 0-40KRPM acceleration and max spin 200-8000RPM, automatic dispense including 2 photoresist pumps
Specifications
| Manufacturer | Solitec |
| Model | 820ACB |
| Condition | Used |
| Stock Number | EM982 |