Samco UV-660

Ozone Stripper

UV ozone stripper/cleaner for removing organic materials ie. solvent residues, photoresist, inks, or polyimides. Substrates are processed using UV light, ozone, and heat. Tools can process 4 x 6" wafers or 1 panel up to 470mm x 320mm. Ozone decomposition scrubber, digital process timer and temperature controller, 115v.