Samco UV-660
Samco UV-660
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Description
Samco UV-660
Ozone Stripper
UV ozone stripper/cleaner for removing organic materials ie. solvent residues, photoresist, inks, or polyimides. Substrates are processed using UV light, ozone, and heat. Tools can process 4 x 6" wafers or 1 panel up to 470mm x 320mm. Ozone decomposition scrubber, digital process timer and temperature controller, 115v.
Specifications
| Manufacturer | Samco |
| Model | UV-660 |
| Year | 1997 |
| Condition | Used |
| Stock Number | EM987 |