Semilab CMS3
Semilab CMS3
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Description
Semilab CMS3 non contact sheet resistance measuring system
CMS, CLS
FAST NON-CONTACT MATERIAL CHARACTERIZATION AND PROCESS CONTROL
Emitter sheet resistance is a primary quality control parameter for silicon wafers in PV applications after emitter diffusion.
The CLS models, CLS-1A, CLS-3A, and CLS-5A, Emitter Sheet Resistance Testers allow measurement of sheet resistance at 1 to 5 points with the high throughput that meets the requirements of in-line quality control in fully automated cell production lines.
The CMS models, CMS-1A, CMS-3A, Emitter Sheet Resistance Testers allow measurement of wafers “on the flyâ€, i.e. conveyor belt does not stop during measurement. Therefore, they have the high throughput that meets the requirement of in-line quality control in fully automated cell production lines.
Featrues and System specifications:
- Meas. technique: non-contact, junction photovoltage (JPV)
- Sample size: 100 to 156 mm (210mm option)
- Sample structure: np or pn junctions
- Measurement range: 10 Ω/sq. to 200 Ω/sq.
- Probe distance: 1.5 mm probe height above transport bel
- Wafer vertical position tolerance: < 400 μm
- Sample support: on belt
- Calibration: by wafers verified with four point probe
Options:
- Measurement module (incl. 1A-5A sheet resistance measurement heads)
- Industrial PC (Windows operation system) and peripherals
- CLS-1M emitter checker – option
- Wafer presence sensor (CMS only)
Wide variety of available interfaces to automation and MES:
- 24V optically isolated I/O, Ethernet interface
- Profibus
- OPC DA
- TCP/IP protocol, content can be XML or ASCII
- SQL database
- SECS/GEM
Specifications
Manufacturer | Semilab |
Model | CMS3 |
Condition | Used |
Stock Number | EM999 |