Veeco-Miller Design FPP-5000 with external 4 pt probe for large substrates

Easy to operate, simply load the wafer and close the lid.

• Automatic calculation and display of sheet or slice resistivity, V/I metallization thickness and P-N type.
• Substrates up to 6" diameter. Larger substrates may be measured with optional external probe.
• Ideal for epitaxial, diffused, ion implanted and metallized layers.
• Automatic ranging
• Four selectable displays
• Sheet Resistivity
• V/I
• Bulk resistivity of a slice with a known thickness
• Thickness in, A, MILS, or microns of a slice or layer with a known bulk resistivity
• RETEST button allows additional measurements without disturbing the probes
• Automatically holds the last reading after the probe is released and until the next measurement is made
• Error code displays indicate improper operation, readings and electronics
• Extended measurement range displays sheet resistivity up to 450k ohm/sq and down to a resolution of .001 milliohm/SQ
• High accuracy of 0.5% of reading on all reading between 5 milliohm to 5 k ohm
• Self test circuitry built in to determine if a fault is present
• Self calibration and zero circuitry assures high accuracy in all but extreme ranges
• Index substrate holder allows repeatable probe positioning on the substrate
• Probe up permits repeatable measurements independent of operator force and substrate thickness
• Plug in probe head adaptors make probe head changing convenient and non critical
• Typing mode determines N and P typing for most semiconductor substrates or layers
• input power of 115/230 VAC +/- 10%, 50/60 Hz