Ulvac Qulee BGM-102L

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Ulvac Qulee BGM-102L Residual Gas Analyzer with Pfeiffer dry pumping system 0-100amu EM tube/Faraday cup


  • Excellent in Cost Performance: Suitable for RGA application
  • Integrated Display: No need for PC
  • Simple Operation: "One Click" function
  • Max 120°C (248°F) high temperature bake (250°C (482°F) when sensors are removed)
  • Electron bombard degas
  • Ion source and secondary electron multiplier protection maintenance help function
  • Traceability of analysis tube (patent pending)
  • Various Leak Tests are Available (Helium leak test, air leak test, leak up)
  • Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included:
  • This software is included and compatible with (Windows XP/7)
  • QIP (Quick Install Package system) is Included:
  • Auto measuring package (refer to the options catalog for details)
  • Conforms with CE


  • Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
  • Residual gas analysis in PVD system and vacuum deposition
  • Residual gas analysis for high vacuum pumping equipment, etc.
  • Residual gas analysis for freeze drying system
  • Various types of gas analysis for research and development


ModelQulee BGM-102L
Stock NumberEM1042