Ulvac Qulee BGM-102L Residual Gas Analyzer with Pfeiffer dry pumping system 0-100amu EM tube/Faraday cup

Features

• Excellent in Cost Performance: Suitable for RGA application
• Integrated Display: No need for PC
• Simple Operation: "One Click" function
• Max 120°C (248°F) high temperature bake (250°C (482°F) when sensors are removed)
• Electron bombard degas
• Ion source and secondary electron multiplier protection maintenance help function
• Traceability of analysis tube (patent pending)
• Various Leak Tests are Available (Helium leak test, air leak test, leak up)
• Capable of total pressure measurement (ionization gauge)
• Qulee QCS is Included:
• This software is included and compatible with (Windows XP/7)
• QIP (Quick Install Package system) is Included:
• Auto measuring package (refer to the options catalog for details)
• Conforms with CE

Applications

• Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
• Residual gas analysis in PVD system and vacuum deposition
• Residual gas analysis for high vacuum pumping equipment, etc.
• Residual gas analysis for freeze drying system
• Various types of gas analysis for research and development