EDWARDS EPX180LE All-In-One Atmosphere-To-HiVac Dry Vacuum Pump Rebuilt

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Edwards EPX180LE All-In-One Atmosphere-To-HiVac Dry Vacuum Pump Rebuilt

The REBUILT compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of < 7 x 10-5 Torr. These are truely amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbomolecular pressure range and can operate continuously at all inlet pressures. Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX 180 pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated. 

The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must commensurate with the environmental conditions (humidity and temperature) such that the dewpoint is not reached. The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again. 

The EPX pump is compatible with Fabworks 32. The EPX pump is supported by four vibration isolators. Pump protection sensors automatically shut down the pump if a fault condition arises. The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX ‘L’ Series has been designed for use in clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface.An Instruction Manual.pdf can be downloaded below at AVAILABLE DOWNLOADS. 

Process Compatibility Applications for EPX 180L Include:

  • Load Lock
  • Transfer Chamber

Features and Benefits Include:

  • Compact Footprint – Smallest in the industry.
  • Low Cost of Ownership – Only 1.4 kW of power.
  • Unique Patent Protected Pumping Mechanism – Pump down at atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures.
  • Ultra Clean Mechanism – No grease or oil lubricated bearings exposed to high vacuum that allows no other source of potential contamination.
  • Extremely Reliable – Has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.

Features for this Rebuilt Refurbished Pump Include:

  • EPX180L High Vacuum Drypump.
  • No TIM (Tool Interface Module) but available.
  • Water Cooling Hookup 3/8 inch Quick Connect.
  • 208 VAC - 3 phase.


ModelEPX180LE All-In-One Atmosphere-To-HiVac Dry Vacuum Pump Rebuilt
Stock NumberEM1049