Watkins-Johnson Company WJ-999R

APCVD (Chemical Vapor Deposition)

Deposition Equipment

Currently Configured for: 200mm

Current Equipment Status: Available

Cassette Type

Robot: WJ

TEOS Cabinet

43 MFCs

Software:

Monitor V3.04

GCU V3.89

WJ955 V2.57 WJ-TEOS999

Overtemp V1.2

WJ996 V4.49

PLC V1.36