1998 AMAT EHP 500

2 SETS AVAILABLE

Wafer Size 200 mm

Fab Section Implant

Asset Description PEA758

Software Version 13.42.18

CIM GEM and SECS

Process ION IMPLANTATION SYSTEM

Still installed but dose not come with the pump and generator. 

Handler System Endstation PP+ with both LOADLOCK 1

Factory Interface SMIF 0 OK

Others

Main System Main Unit 1 OK

scrubber Exhaust 1 OK

2 stage rough pump 1 OK

Load lock rough pump 1 OK

Missing/ Faulty Parts/ Accessories List

LHS and RHS turbo pump and controller 2

scrubber Exhaust 1

Load lock rough pump 1

2 stage rough pump 1

source turbo pump and controller 1

source rough pump 1

Target cryo CT10 1

compressor 1

Beamline turbo pump and controller 1

Analyzer turbo zapump and controller 1

lhs and rhs LPT 2