2018 Applied Materials AMAT Endura II Liner/Barrier

PVD (Physical Vapor Deposition)

Deposition Equipment

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Missing or damaged parts: Fab confirmed there are no missing or damaged parts

Software Version (include revision #)enB3.2_75

Chamber Description Chamber Chemicals Gases Used

Chamber E DMD Ar

Chamber F DMD Ar

Chamber 2 RF PVD TiN Ar,N2

Chamber 3 RF PVD TiN Ar,N2

Chamber 4 RF PVD TiN Ar,N2