2010 AMAT Endura II Liner/Barrier

PVD (Physical Vapor Deposition)

Deposition Equipment

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Tool config is based on original PO, please verify tool details at tool inspection

Tool Model: ENDURA2

Controller: GEN2

Software Version: eentB5.0_140

System Power Rating: 208V AC 3-Phase +480V AC Noraml

Loading Configuration: 3 load ports

Chm/Unit Position 1: EXTENSA TTN; Gas: Ar/N2

Chm/Unit Position 2: EXTENSA TTN; Gas: Ar/N2

Chm/Unit Position 4: EXTENSA TTN; Gas: Ar/N2

Chm/Unit Position C: RPC Gas: Ar/H2/He

Chm/Unit Position D: RPC Gas: Ar/H2/He

Chm/Unit Position E: DMD Degas; Gas: Ar

Chm/Unit Position F: DMD Degas; Gas: Ar

DEGAS Chamber

Chamber Position: E,F

Process Type: DMD

RPC Chamber

Chamber Position: C,D

Process Type: PCxT

Shutter Option: no

Slit Valve Seal (bonded or o-ring): Bonded

Kit, BEOL, PCxT-PRECLEAN Kit (CH C): See Below

PEDESTAL, TITANIUM 300MM PCII - REPAIR: 0020-19258

BELLJAR, 21 OD 300MM PC XT/XTE - REPAIR: 0040-55456

SHIELD, LOWER ALUMINUM 3-STRAP - REPAIR: 0040-86514

SHIELD, INNER 300MM PCXT/RPC - REPAIR: 0021-19342

INSULATOR, PEDESTAL QTZ 300MM PCII - REP: 0200-01903

SEAL, RF SPRING: 0015-01573

Clean Vendor: SHT/KTT

Shutter Part No.: NA

RF Power Supply: COMDEL CDX-2000 Dual RF Generator：AMAT　P/N：0190-40655

Chamber Position: 1,2,4

Process Type: EXTENSA TTN

Current Target Material: Ti

Shutter Option: Yes

Chamber Body: Hybrid

Chamber Body p/n: 0040-76824

Slit Valve Seal (bonded or o-ring): Bonded

Magnet Type: LDR Adv TTN

Magnet Part No.: 0010-45647, 0010-45645

Magnet Serial No./ Manf. Date: no need

AMAT Target Part No.: 0190-01284

Target Vendor: NIKKO

Target Part No.: 0190-01284

Exensa TTN (CH 3) KIT, AMAT ENDURA2-EXTENSA TTN – REP : See Below

Shutter Part No.: 0021-26896

Pedestal Type: DTESC

Pedestal Part No.: 0010-42030

Cryo Restrictor: Yes

Cryo Restrictor Part No.: -

E-Magnet powersupply: P/N:0195-10842

Cathode Master P/S: AE MDX PINNACLE P/N：0190-25689

Cathode Slave P/S: AE MDX PINNACLE P/N：0190-25689

Total Cathode Power: 40 kw

RF Bias P/S: ENI GHW-12Z：0190-25529

RF Bias Generator: 1250w 13.56 MHz

Process Type: COOL

Chamber position: A,B

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales