1985 KLA SURFSCAN 6220

Wafer Size 200 mm

Fab Section Metrology

Tool Status Running Wafers

Asset Description PCT0009(SMP-CTECH)

Software Version WIN95

CIM GEM

Process DO MEASUREMENT

Options System NA OK

Others LPT 1 OK

Main System Main body OK

Handler System HANDLER 1 OK

Factory Interface SMIF 1 OK