1997 Nikon NSR 2205 i 12 D Stepper

8"

- 3 Phase, 50/60 Hz, 200/208 Vac

- Software: open VMS VAX V6.1

- NA variable system

- Reticle size: 5"

- Fixed reticle microscope

- Max field size: 22 x 22

- Reticle barcode reader

- Reticle case size: 5"

- Wafer type: notch

- Wafer chuck size: 8"

- Wafer chuck type: ring

- Pre alignment

- Pre alignment hammer (6)

- Wafer loader type: 3

- Chip leveling

- In-line

- Wafer carrier table: center / right

- Alignment sensor: FIA, LSA

- HP laser model 5517C

- Rack type: left

- Body-OP rack cable: 3M

- SHIRINC

- Shrink Illuminator

- Focus check function: TTLFC2

- Signal tower

- Chamber temp: 23.0*C

1997 Vintage