2019 Tabletop SEM SNE-4500M plus B Set

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Option : EDS (Bruker X Flash) , Ion Coater Sputter (MCM-100)

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Status : Installed , as is working (used only for a DEMO, few years actual operations include covid 19 Period)

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Components:

SEM Main Body (1 ea). SEM Utility ( 1 ea) , PC (1 ea) , Monitor (1ea), Rotary Pump (1ea), Air Compressor (1ea) , Bruker EDS ( 1 ea, Installled in SEM Main), EDS Connecting Box (1ea) EDS Control Box (1ea) , 2nd Monitor (1ea) , StoneBlock (Vibration protection, 1ea) Ion Coater Sputter (1ea), Sample Handling Kit ( Sample Hight Checker, Sample Holder, Wrench for sample stage)

1.

Spec

1)

SNE 4500M Plus B

Electron-Optic System

• Magnification: SEC Standard Max. 150,000x

• Accelerating Voltage: 1kV to 30kV (6 Steps)

• Signal Detection: SE Detector + BSE Detector

• Electron Gun: Pre Centered

Tungsten Filament Cartridge

• Lens : Two stage Condenser

One stage Objective

• Stigmator: 8 Pole Electromagnetic

• Aperture: 4 Hole Variable (30um, 50um, 50um, 100um)

■ Stage System – 5 axis system

• Fully motorized stage - 5 axis (X,Y,R,T,Z)

• X and Y axis: 40mm

• R axis: 360°

• T axis: -45 to 90°

• Z axis: 0 to 40mm

• Max. Sample loading: 80mm in dia. x 40mm in height

■ Evacuation System

• Rotary Pump + Turbo Pump

• High Vacuum System (Start up 3min)

• Low Vacuum System (Air Compressor)

■ Display

- Scan Mode: 320x240, 640x480

- Photo Mode: 1,280x960, 2,560x1,920, 5,120x3,840

- Auto Adjustment: Auto Focus, Auto Con/Brightness

- Image Format: BMP • JPG • PNG• TIF

- Navigation Mode: Top-view CCD Camera (Display sample image)

HD Video Capture: Up to 1280x720 pixels

■ General

• Dimension: 390 x 380 x 560 mm (Main Body), 390 x 325 x 560 (Control Unit),

400 x 160 x 340mm(Rotary Pump), Air Compressor

• Power Source:

Single Phase 220VAC, 50/60Hz,

■ Warranty: As is (Currently Installed)

2)

Bruker X Flash 630H Mini

■ EDS(Energy Dispersive X-ray Spectrometer System)

• Detector: LN2-free high-speed SDD detector

• Chip size: 30mm²

• Element detection range: Boron(5) ~ Americium(95)

• Spectrum resolution: Less than 129eV (Standard: MnKα)

• Max X-ray Throughput: 150,000 CPS

• Software: Spectrum, Line scan, Mapping and report (QUANTAX series)

■ 2nd PC Monitor : HP

■ Warranty: As is (Currently Installed)

3) Ion Coater Sputter MCM-100P

■ Ion Coater Sputter (Sample Coater)

• Target Material : Pt

• Target electrode Size : Φ50mm

• Chamber Size : Φ120mm * 65mm

• Sample Table Size : Φ50mm

• Electrode Sample Table Interval : 35mm

• Dimension : 180(W) * 310(D) * 310 (H) 15 kgs

• Minimal Vacuum, Current & Vacuum Setting with Recipes

■ Warranty: As is (Currently Installed)