Thermo Fisher FEI Apreo C LoVac

Apreo C LoVac FESEM with electrostatic final lens

Resolution:

15kV – 1.0nm

1kV – 1.3nm

1kV (decel) 1.0nm

Low Vacuum:

15kV - 1.2nm

3kV – 1.8nm

System includes EDX