DNS WS-820L

Process Application

Batch Wafer Wet Processing

Wafer Size

200mm

System Details

Main Power: 208VAC, 3 Phases

UPS: 208VAC, 3 Phases

Machine Status: Dismantled

Software Language: English

Operational Manual: No

Electrical Diagram: No

UPS Battery for Main: No

Power Box: Yes

Hot DI Unit: Yes, 2ea. (Brand/Model = Komatsu/PWH-96N-UL)

Fire Extinguisher: No

Main Robot: Yes, 6ea.

Concentration Monitor: Yes, 2ea. (Brand/Model = Horiba/CS-220L-15-AA)

Mega Sonic: No

Bellow Pump: Yes, 5ea. (Brand = Iwaki)

Heat Exchanger: No

PC Program (Hard Disk): No

Cassette Stocker: Yes, 10ea. – Shelf 1 ~ 15

Robot Chuck: Yes, 6 sets (Material: Quartz + Coated)

Bath: Yes

Quartz Circulation Bath – 4ea.

Quartz DI Bath – 4ea.

PTFE Bath – 1ea. for HF, Non-Circulation Type

PLC: Yes

(Brand/Model = Mitsubishi-OMRON/Model: A3A P21)

Dryer: Yes (Model = Yield Up Dryer (DI Slow Down Type))

External Units: Yes

HF Mixing Unit – 1 ea.

H2SO4 Drain Buffer Tank – 1ea., 70l

Pendant: No

Quartz Box and Others: Total 39 Boxes

HEPA Filter: #1 ~ #7

HS 1 Bath, Arm 4, 5(Left, Right)

F/R Bath

W/G: HS1, 2, QDR, F/R

HQDR Bath

SC1-1 Bath

HQDR Bath

SC1-2 Bath, Arm 2, 3(Left, Right)

QDR Bath

HS2 Bath, Arm 2, 3(Left, Right)

W/G: SC1-1, SC1-2, HQDR 1, 2

City Water Supply Valve Box

Exhaust Pipe

System Baths Configuration

Position and Process

1: In CTC

2: WF Wait Position

3: CHCL

4: HB-1

5: HB-2

6: HQDR

7: SC1-1

8: SC1-2

9: HQDR

10: HF + Rinse

11: QDR

12: F/R

13: Yield Up Dry

14: Out CTC

Missing Parts

Electromagnetic Valve Unit

Electronic Cool Thermostat Unit Only