1996 KLA Tencor Surfscan 6420

›Automatic Surface Inspection System

›Bare Wafer Surface Defect Inspection System

›Substrate/Sizes: 6" and 8" Wafer Capable

›Thickness: SEMI Standard Wafer Thickness

›Throughput: 100 wph (200 mm) at 0.12 mm

›Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength

Description Automatic Surface Inspection System

Other Information 

›Vaccum: 6mm (0.25 in.) line – 500mm (20 in.) of Hg / flow rate 0.24 l/s

›Ducted Venting: two 100mm (4 in.) exhaust hoses

›Power: 200-240V, 50/60 Hz, 2kVA

Environment: ≥Class 10 

Condition Very Good

Year of Manufacture 1996

Power Requirements 200-240 V   50 Hz

Exterior Dimensions   Width 29.921  in  (76.0 cm)  Depth 40.945  in  (104.0 cm)  

Height 66.142  in  (168.0 cm)

Weight 728  lb  (330 kg)