1997 Canon 5500iZ

still in production, deinstallation date 01.02.25

1) no harddisk in stepper Workstation (EWS) installed:

backup of stepper system parameter available

2) No Hg-lamp installed

3) No UPS unit installed.

4) all batteries, C-oil and cooling fluid will be removed before shipping because of safety regulations

5) no MO drive installed

- wafer handling and wafer chuck configured for 12" wafer processing

- SMIF pod reticle changer

- 6" reticle size

Year of Manufacture 1997

Condition Good

Exterior Dimensions   Width 90.551  in  (230.0 cm)  Depth 133.858  in  (340.0 cm)  

Height 102.362  in  (260.0 cm)

Weight 25,132  lb  (11,400 kg)